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Up to 12″ EFEM

efem
Model EFEM
Type EFEM
Wafer load FOUP
Wafer size 300mm
Mini Environment yes
Probe Changer 1, 2 or 4 probes
Aligner yes
Size depends on configuration
Range 1mΩ/☐ to 10MΩ/☐
Accuracy 0.5%
Repeatability 0.02% static
Repeatability 0.1% dynamic

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