Up to 12″ EFEM

Model	EFEM
Type	EFEM
Wafer load	FOUP
Wafer size	300mm
Mini Environment	yes
Probe Changer	1, 2 or 4 probes
Aligner	yes
Size	40” x 63” x 56”
Range	1mΩ/☐ to 10MΩ/☐
Accuracy	0.5%
Repeatability	0.02% static
Repeatability	0.1% dynamic