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Up to 12″ ResMap 463 FOUP

up to 12" ResMap 463 FOUP
Model 463 FOUP
Type Floor Standing
Wafer load FOUP LoadPort
Wafer size 300mm, 8” and 300mm
open cassette with adapter
Mini Environment yes
Probe Changer 1,2 or 4 probes
Aligner yes
Range 1mΩ/☐ to 10MΩ/☐
Accuracy 0.5%
Repeatability 0.02% static
Repeatability 0.1% dynamic

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