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EFEM ready up to 12″ ResMap 4E3

EFEM ready up to 12" ResMap 4E3
Model 4E3
Type EFEM attached
Wafer load EFEM + Manual
Wafer size 300mm
Mini Environment N/A
Probe Changer 1, 2 or 4 probes
Aligner yes
Size 17” x 17” x 20”
Range 1mΩ/☐ to 10MΩ/☐
Accuracy 0.5%
Repeatability 0.02% static
Repeatability 0.1% dynamic

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