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  • 2” to 12” wafer resistivity
    2” to 12” wafer resistivity
    ”Table top, Floor standing, EFEM”
  • ”performance, accuracy…”
    ”performance, accuracy…”
    ”automatic wafer load systems…”
  • ”…reliability, low cost of ownership”
    ”…reliability, low cost of ownership”
    ”…or table top manual wafer load systems”
  • ”wide selection of probes”
    ”wide selection of probes”
    ”soft touch smallest edge exclusion”
  • ”total flexibility of measurement patterns”
    ”total flexibility of measurement patterns”
    ”comprehensive data analysis software”

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Contact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact the sample for the measurement.
– Wide measurement range
– Suitable for various samples.

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