2’ to 300mm wafer resistivity and thin film metrology

Table top, Floor standing, EFEM

performance, accuracy…

automatic wafer load systems…

…reliability, low cost of ownership

…or table top manual wafer load systems

wide selection of probes

soft touch smallest edge exclusion

total flexibility of measurement patterns

comprehensive data analysis software

Contact type resistance measurement

– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.