2” to 12” wafer resistivity ”Table top, Floor standing, EFEM” ”performance, accuracy…” ”automatic wafer load systems…” ”…reliability, low cost of ownership” ”…or table top manual wafer load systems” ”wide selection of probes” ”soft touch smallest edge exclusion” ”total flexibility of measurement patterns” ”comprehensive data analysis software” 178 ResMap 273 ResMap 168 ResMap Auto 463 FOUP News Contact type resistance measurement – Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement. – Wide measurement range – Suitable for a various samples.