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  • 2” to 12” wafer resistivity
    2” to 12” wafer resistivity
    ”Table top, Floor standing, EFEM”
  • ”performance, accuracy…”
    ”performance, accuracy…”
    ”automatic wafer load systems…”
  • ”…reliability, low cost of ownership”
    ”…reliability, low cost of ownership”
    ”…or table top manual wafer load systems”
  • ”wide selection of probes”
    ”wide selection of probes”
    ”soft touch smallest edge exclusion”
  • ”total flexibility of measurement patterns”
    ”total flexibility of measurement patterns”
    ”comprehensive data analysis software”

178 open wafer blue

178 ResMap

273 ResMap

273 ResMap

168 ResMap Auto Load

168 ResMap Auto

463 FOUP

463 FOUP

News

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Contact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.

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