Up to 12″ ResMap 273

Model	273
Type	Table Top
Wafer load	Manual
Wafer size	2” to 300mm
Mini Environment	N/A
Probe Changer	N/A
Aligner	N/A
Size	15” x 18” x 10”
Range	1mΩ/☐ to 10MΩ/☐
Accuracy	0.5%
Repeatability	0.02% static
Repeatability	0.1% dynamic