EFEM ready up to 12″ ResMap 4E3
| Model | 4E3 |
| Type | EFEM attached |
| Wafer load | EFEM + Manual |
| Wafer size | 300mm |
| Mini Environment | N/A |
| Probe Changer | 1, 2 or 4 probes |
| Aligner | yes |
| Size | 17” x 17” x 20” |
| Range | 1mΩ/☐ to 10MΩ/☐ |
| Accuracy | 0.5% |
| Repeatability | 0.02% static |
| Repeatability | 0.1% dynamic |
