Up to 12″ ResMap 463 FOUP
| Model | 463 FOUP |
| Type | Floor Standing |
| Wafer load | FOUP LoadPort |
| Wafer size | 300mm, 8” and 300mm open cassette with adapter |
| Mini Environment | yes |
| Probe Changer | 1,2 or 4 probes |
| Aligner | yes |
| Size | 22” x 45” x 53” |
| Range | 1mΩ/☐ to 10MΩ/☐ |
| Accuracy | 0.5% |
| Repeatability | 0.02% static |
| Repeatability | 0.1% dynamic |
