Up to 8″ ResMap 168
| Model | 168 |
| Type | Table Top |
| Wafer load | open cassette |
| Wafer size | 4” to 8” |
| Mini Environment | N/A |
| Probe Changer | N/A |
| Aligner | N/A |
| Size | 12” x 28” x 10” |
| Range | 1mΩ/☐ to 10MΩ/☐ |
| Accuracy | 0.5% |
| Repeatability | 0.02% static |
| Repeatability | 0.1% dynamic |
