Up to 8″ ResMap 168 Solar Model 168 Solar Type Table Top Wafer load open cassette Wafer size 4” to 8”, 152mm x 152mm Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 28” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamic