Up to 8″ ResMap 178 Solar Model 178 Solar Type Table Top Wafer load Manual Wafer size 2” to 8”, 152mm x 152mm Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 19” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamic