Up to 8″ ResMap 468 SMIF
| Model | 468 SMIF |
| Type | floor standing |
| Wafer load | SMIF |
| Wafer size | 8″ |
| Mini Environment | yes |
| Probe Changer | 1, 2 or 4 probes |
| Aligner | N/A |
| Size | 22” x 45” x 53” |
| Range | 1mΩ/☐ to 10MΩ/☐ |
| Accuracy | 0.5% |
| Repeatability | 0.02% static |
| Repeatability | 0.1% dynamic |
